縦形放電励起エキシマレーザ中のプラズマの実験的研究

Abstract

Laser output characteristics of a longitudinal discharge XeCl excimer laser with automatic UV preionization were investigated. The dependences of the laser output peak powers on the buffer gas pressure, the Xe gas pressure and the HCl gas pressure in He/Xe/HCl and Ne/Xe/HCl were measured. The optimum gas mixtures were obtained. Time-dependent particle number densities of the excited components (Xe^<+*>, He^*) in the laser were measured by the laser absorption probing with a cw dye laser on the buffer gas pressure, the Xe partial gas pressure and the HCl partial gas pressure. The peak densities of the Xe^<+*> (6s^4P_<3/2>) ions and the He^* (2p ^3P) atoms were about 8×(10)^<10>(cm)^<-3> and 7×(10)^<11>(cm)^<-3>, respectively The densities were compared with those in transversal discharge XeCl excimer lasers. The formation dynamics of the XeCl excimer molecules, excited atoms and excited ions were discussed. The dependences of the particle number densities of the Xe^<+*> ions on the buffer gas pressure, the Xe gas pressure and the HCl gas pressure were investigated.