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Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/933

Title: ArFエキシマレーザ放電における励起種の生成機構
Other Titles: ARF エキシマ レーザ ホウデン ニオケル レイキシュ ノ セイセイ キコウ
Formation Dynamics of Excited Components in ArF Excimer Laser Discharge
Authors: 古橋, 秀夫
内田, 悦行
UCHIDA, Yoshiyuki
Issue Date: 31-Mar-1993
Publisher: 愛知工業大学
Abstract: Time-resolved density measurements of excited components in a discharge pumped ArF excimer laser were performed using laser absorption probing with a cw dye laser pumped by a Ar^+ laser. The dependence of the He^* 2p^3P densities on the gas parameters were measured. The relationships between laser output power and the number densities of He^* are discussed. The relationships between the laser output power and the formation rate of Ar^+ ions by Penning ionization with He^* atoms are also discussed.
URI: http://hdl.handle.net/11133/933
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