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Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/929

Title: 平面型リニアパルスモータの閉ループ精密位置決め
Other Titles: ヘイメンガタ リニア パルス モータ ノ ヘイループ セイミツ イチギメ
A Close Loop Positioning System of a Dual-Axis Linear Motor
Authors: 新宮, 博康
鷲見, 哲雄
野平, 重光
古橋, 秀夫
内田, 悦行
山田, 諄
SHINGU, Hiroyasu
SUMI, Tetsuo
NOHIRA, Shigemitsu
UCHIDA, Yoshiyuki
Issue Date: 31-Mar-1993
Publisher: 愛知工業大学
Abstract: A dual-axis positioning system of high accuracy has been developed using two Sawyer linear motors. The fundamental positioning characteristics of the motor have been described. Maximum absolute positioning errors on the positioning plane were mechanically improved within 12 [μm]. A Fizeau-type laser interferometer with a resolution of 0.2[μm] was used for displacement measurement. The positioning accuracy has been improved within 1[μm] by using a microstep electric operation and a computer controlled close loop operation.
URI: http://hdl.handle.net/11133/929
Appears in Collections:28号

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