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http://hdl.handle.net/11133/654
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| Title: | MOS界面準位密度の自動測定 |
| Other Titles: | MOS カイメン ジュンイ ミツド ノ ジドウ ソクテイ
Automatic Measurements of Interface-State Densities in MOS Structures |
| Authors: | 徳田, 豊
TOKUDA, Yutaka |
| Issue Date: | 31-Mar-1983 |
| Publisher: | 愛知工業大学 |
| Abstract: | The microcomputer-controlled DLTS system for the automatic measurements of interface-state densities in MOS structures is described. The present system can draw curves of the interface-state densities versus temperature or energy level during a DLTS thermal scan. Therefore, this system allows the rapid evaluation of the interface-state densities and is suitable to the MOS process control. Experimental results are given for the nSi-SiO_2 interface. |
| URI: | http://hdl.handle.net/11133/654 |
| Appears in Collections: | 18号
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