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Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/3079

Title: 実験教育を目的とした真空蒸着装置の改良
Other Titles: ジッケン キョウイク オ モクテキ トシタ シンクウ ジョウチャク ソウチ ノ カイリョウ
Improvement of the vacuum evaporator for the purpose of the experiment education
Authors: 高木, 淳
大鐘, 亮
TAKAGI, Atsushi
Issue Date: 31-Mar-2016
Publisher: 愛知工業大学
Abstract: "A vacuum evaporator is a primary device of the vacuum technology. It is mainly used for film manufacture of metal and metal oxide and is industrially useful for a semiconductor and electronic device manufacture. We adopt a vacuum evaporator in the physical experiment class opened for sophomore students in sciences for vacuum technical education in Aichi Institute of Technology. We reconsidered this device from an educational point of view and improved it as the apparatus that is easy to use, secure and superior in maintainability."
URI: http://hdl.handle.net/11133/3079
Appears in Collections:51号

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