イオン注入に立脚した難加工性材料の超精密剥離技術の開発

Abstract

"Hydrogen ion-implantation into Hard-to-Process Materials and subsequent heat treatment causes dome-shaped gas-filled blisters and craters appear on the surface. This method becomes an attractive nano fabrication technology having high accuracy and high environment-friendly process. We newly tried for this technique to metal materials, such as titanium and aluminum-ally, and a CFRP composit material. When the same conditions as a semiconductor crystal were used, in the aluminum Magnesium alloy, the separation phenomenon was able to be found out on the surface. The existence of the crystalline phase considered to have formed by the rolling has leaded exfoliation."