ヘリウムプラズマ照射を受けたモリブデン表面の繊維状ナノ構造形成のための温度範囲の同定

Abstract

Nanostructure formation on molybdenum surface due to helium plasma exposure is investigated, focusing on the temperature band for fiber-form nanostructure growth. A precise temperature measurement can be obtained using thin thermocouples inserted into sheet specimens. The temperature range for nanostructure growth is determined to be 800 ~ 1050 K under the incident helium ion energy of 50 ~ 100 eV. The surface morphologies at around upper and lower boundary temperatures are different from a standard fiber-form nanostructure. The nano-fibers of molybdenum in a standard case was found to have a diameter of about 50 nm, while that of tungsten is a half of the molybdenum fibers.