自己結合型センサを利用した変位と速度の同時測定に関する研究

Abstract

Recently, a demand for simultaneous measurement of displacement and velocity in the manufacturing process is increasing. Then, we have studied on a laser sensor which can measure displacement and velocity simultaneously by using the self-coupling effect of a semiconductor laser. This sensor is compact and low cost as the sensor head consists of only a semiconductor laser and a lens. The laser driver and receiver circuits are designed on the basis of data of two type VCSEL selected. It is confirmed that the laser sensor can measure displacement up to several tens centimeter and velocity up to 1m/s simultaneously. The error is under 1% in displacement measurement and is about 2% in velocity measurement.