原子的構造解析システムの現状と課題(II）

Abstract

In Research Institute for Industrial Technology，Aichi Institute Technology, a TEM CCD-camera (Orius SC1000) has been installed in the transmission electron micro-scope (JEOL JEM-2010). This camera mounted at the bottom of the system allows the user to view and record easily high resolution images. And it offers high speed (> 14 fps) image viewing mode, and capability of high quality TEM in-situ observation. In addition，two computer-controlled sample-preparation systems have been equipped recently. By the ion slicer system (JEOL EM-9100IS) we can prepare thin-film specimens faster and easier than before，where low-angle Ar ion beam irradiates the specimens using a thin shield belt. The Gentle Mill 3 (IV8) can eliminate surface damage caused by the high-energy ion beam irradiation to represent real crystal structure instead of artifacts in TEM analyses.