スクイーズ膜効果を用いたミニチュアロボット浮上量推定とその応用

Abstract

This paper describes a feasibility of floating height estimation of a miniature robot using squeeze film effect. The miniature robot can levitate with a vertically vibrating piezoelectric element. It is difficult to measure the floating height of the robot because of the restriction of measurement instruments. The input voltage and load current of the piezoelectric element used in the vertical vibration contain the information of the floating height. The input voltage and load current which are obtained in both the floating miniature robot and the landing miniature robot are compared. An inchworm-type miniature robot using a vertical levitation is also proposed. The levitating elements move sequentially by the deformation of a horizontal piezoelectric element. Some experimental results are shown.