振動を用いて浮上するマイクロロボットの平面移動

Abstract

Friction control by the use of the vibration of a piezoelectric element is used in active bearings. The aim of this report is to propose a transverse displacement of a microrobot which levitates in air by the vibration. The advantages of this work are (i) the microrobot itself vibrates and levitates，(ii) the barycentric position of the microrobot changes the moving direction，and (iii) the microrobot can move in any directions. This report shows the structure of the one degree of freedom and two degrees of freedom microrobots and some experimental results.