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Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/1687

Title: マイクロマシンの浮揚に関する基礎的研究
Other Titles: Basic Research for the Levitation of Micromachine
Authors: 鳥井, 昭宏
坂野, 正昭
植田, 明照
TORII, Akihiro
BANNO, Masaaki
UEDA, Akiteru
Issue Date: 7-Oct-2008
Publisher: 愛知工業大学
Abstract: We describe the structure of a micromachine, and preliminary experimental results. The micromachine, which consists of a piezoelectric element and two masses, can jump or levitate on a flat surface. The micromachine jumps by the rectangular voltage applied to the piezo, and levitates by the sinusoidal voltage. The height of the jump and the levitation is discussed by the use of some different experimental conditions. The height of the jump of the micromachine is about 10 μm by using a rectangular voltage. The micromachine levitates in about 10 μm by the use of a sinusoidal waveform. The jump and levitation of the micromachine are measured with a displacement sensor, an optical microscope, and an electrical circuit.
URI: http://hdl.handle.net/11133/1687
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