マイクロマシンの浮揚に関する基礎的研究

Abstract

We describe the structure of a micromachine, and preliminary experimental results. The micromachine, which consists of a piezoelectric element and two masses, can jump or levitate on a flat surface. The micromachine jumps by the rectangular voltage applied to the piezo, and levitates by the sinusoidal voltage. The height of the jump and the levitation is discussed by the use of some different experimental conditions. The height of the jump of the micromachine is about 10 μm by using a rectangular voltage. The micromachine levitates in about 10 μm by the use of a sinusoidal waveform. The jump and levitation of the micromachine are measured with a displacement sensor, an optical microscope, and an electrical circuit.