極微小電流計測型ナノプローブその場観察システムの開発

Abstract

Piezo-driving spedcimen holder for Atomic scale high-resolution electron-microscopy (TEM) was realized. Various in-situ experiments in TEM, example for, strucyual variation, contact-force, contact electricalcurrent, bondig, separation were observed. The deformation process of multiwalled carbon nanotubes was directry observed using TEM. High elasticity and the subsequent damage process of the nanotube were demonstrated. In-situ Current-Voltage Characters were caliculated with several multimeters integrated with PC.