デスクトップファクトリ用ミニチュアロボットの変位計測

Abstract

A rotational displacement of a miniature robot, which is used in a desktop factory, is described. The robot is about 3 cm in diameter and about 40 g in weight. The robot consists of three piezoelectric elements and they are operated by triangular waveforms. The robot is so small that small sensors are used. The displacement of the robot is measured by three position sensitive detectors, which are mounted on the robot. The measurement principle is described. The rotational displacement is in the order of mrad. However, the robot yields linear displacement when the control signals for the rotational displacement are applied to the robot.