機能性レーザ加工技術の開発と産業応用に関する研究

Abstract

The purpose of this study is to develop a new functional technology of laser material processing and to find its industrial applications. Some creative methods and results are reported, related to construction of an excimer laser material processing system, design and production of advanced materials, including excimer laser material processing. A clear explanation of the processing mechanism and new industrial applications are also reported. A material processing system using an excimer laser was constructed. Precise automatic alignment technique using differential moire signals was developed for this system. Ceramic-based superconducting thin films were produced by a magnetron sputtering system for advanced material. Ceramic-based functionally graded materials of thick blocks were produced by a progressive lamination method using a solid-fluid separation technique. Nonlinear optical crystal with epitaxial growth was produced by molecular beam epitaxy, and optical second and third harmonic generations were observed. A digital image processing system with a streak camera was constructed for a clear explanation of the ablation mechanism. Experimental optimization of the parameter relative to cutting, drilling and surface treatment was made. Three dimension stereolithography was constructed with photo-curable materials by laser holography. A creative method for a functionally integrated hybrid element processed by laser was found, It can be conclude that there is a fair chance for new industrial applications.