大気圧Ar/He マイクロ波プラズマ・ジェットの生成と消滅過程

Abstract

Dynamic behaviors of gas/plasma mixture produced with microwave discharge jet at atmospheric pressure have been investigated in terms of the effects of working gas dynamics on the discharge characteristics, focusing on the following four points : formation of discharge jet at the ignition phase, growing speed of plasma plume in relation to gas flow rate, acceleration and deceleration of upward movement of plasma plume, and decay process of plasma column at turn-off of microwave power.