カソードレンズ解析のための表面電荷法による電界計算精度の検討

Abstract

The accuracy of the electric field calculated by the surface charge method was investigated for the analysis of the cathode lens of the emission electron microscope. The surface charge density and the electric field were calculated for a system consisting of a large plate electrode and a point charge and the accuracy was examined in comparison with the theoretical values. The calculation revealed that a large calculation error arises for the electric field close to the electrode surface and that the error is caused by the singularity of the electric field calculation. It is found that this error is excluded when the surface of the electrode is appropriately divided in accordance with the point of electric field calculation, resulting in an improvement in the accuracy of the electric field calculation.