ゼオライトフィルタを用いた簡易SF_6/N_2混合ガス分離回収装置の実用化検討

Abstract

The authors once proposed to use a zeolite filter as portable SF_6/N_2 mixture processing equipment that condense SF_6 concentrations of the mixture and store processed gas. Performance test of a prototype filter showed that SF6 is perfectly adsorbed and the exhausted gas from the filter is pure N_2 (undetectable level of SF6 by gas chromatograph). The boundary of S_6 adsorbed range has a steep front, indicating an effective operation of the filter. SF_6 fractions of the sorbate phase (solid phase) has been evaluated from the test result, and it is shown that high fraction is expected, for example 70% corresponding to processed mixture of 5% and 83% corresponding to processed mixture of 10%. The process of SF_6 release from and renewal of the filter by thermal swing adsorption (TSA) has also been investigated to find a commercially suitable temperature. The result indicates that about 150℃ is suitable. Referring from these test results, discussions are made about the feasibility of this new concept portable SF_6/N_2 mixture processing equipment.