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Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/1209

Title: ゼオライトフィルタを用いた簡易SF_6/N_2混合ガス分離回収装置の実用化検討
Other Titles: ゼオライトフィルタオモチイタカンイSF_6/N_2コンゴウガスブンリカイシュウソウチノジッケンカケントウ
Feasibility study of portable SF_6/N_2 mixture processing equipment
Authors: 村瀬, 洋
依田, 正之
澤, 五郎
猪原, 俊明
今井, 隆浩
豊田, 充
MURASE, Hiroshi
YODA, Masayuki
SAWA, Goro
INOHARA, Toshiaki
IMAI, Takahiro
TOYODA, Mitsuru
Issue Date: 31-Mar-2003
Publisher: 愛知工業大学
Abstract: The authors once proposed to use a zeolite filter as portable SF_6/N_2 mixture processing equipment that condense SF_6 concentrations of the mixture and store processed gas. Performance test of a prototype filter showed that SF6 is perfectly adsorbed and the exhausted gas from the filter is pure N_2 (undetectable level of SF6 by gas chromatograph). The boundary of S_6 adsorbed range has a steep front, indicating an effective operation of the filter. SF_6 fractions of the sorbate phase (solid phase) has been evaluated from the test result, and it is shown that high fraction is expected, for example 70% corresponding to processed mixture of 5% and 83% corresponding to processed mixture of 10%. The process of SF_6 release from and renewal of the filter by thermal swing adsorption (TSA) has also been investigated to find a commercially suitable temperature. The result indicates that about 150℃ is suitable. Referring from these test results, discussions are made about the feasibility of this new concept portable SF_6/N_2 mixture processing equipment.
URI: http://hdl.handle.net/11133/1209
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