自己結合効果を用いた微小振動センサに関する研究

Abstract

Small vibration sensors using laser interferometer have been developed. But there are some disadvantages, for example, weakness for external vibration, difficulty for optical alignment, etc. These disadvantages are improved making use of selfcoupling effect of semiconductor laser, because this sensor is composed of only a laser diode and a lens. When a small vibration less than halfwave length of laser is measured, it is needed a reference signal. The reference signal is generated by moving the sensor head quickly. The vibration amplitude is detected from ratio of output signal to reference one. This sensor can detect small vibration with minimum amplitude of 2Onmind average dispersion error is below 2 percent.