DSpace DSpace 日本語

AIT Associated Repository of Academic Resources >
A.研究報告 >
A1 愛知工業大学研究報告 >
3.愛知工業大学研究報告 .B(1976-2007) >
34号 >

Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/1072

Title: 放電励起ArFエキシマレーザーのシミュレーションモデル
Other Titles: ホウデン レイキ ARF エキシマ レーザー ノ シミュレーション モデル
Simulation Model of a Discharge Pumped ArF Excimer Laser
Authors: 古橋, 秀夫
内田, 悦行
UCHIDA, Yoshiyuki
Issue Date: 31-Mar-1999
Publisher: 愛知工業大学
Abstract: A simulation model of a discharge pumped ArF excimer laser was developed based on the Boltzmann transport equation, rate equations and the circuit equation. Uniform plasma was assumed. It is one-dimensional model. Time histories of the laser output power, number densities of species in the plasma, currents and voltages were calculated numerically. The results were compared with the experimental results by spectroscopic methods. The peak-electron density, discharge voltage, and particle number densities agreed well, but their temporal behaviors differed.
URI: http://hdl.handle.net/11133/1072
Appears in Collections:34号

Files in This Item:

File Description SizeFormat
紀要34号B(P145-151).pdf614.66 kBAdobe PDFView/Open

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


Valid XHTML 1.0! DSpace Software Copyright © 2002-2010  Duraspace - Feedback