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Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/1072

Title: 放電励起ArFエキシマレーザーのシミュレーションモデル
Other Titles: ホウデン レイキ ARF エキシマ レーザー ノ シミュレーション モデル
Simulation Model of a Discharge Pumped ArF Excimer Laser
Authors: 古橋, 秀夫
内田, 悦行
FURUHASHI, Hideo
UCHIDA, Yoshiyuki
Issue Date: 31-Mar-1999
Publisher: 愛知工業大学
Abstract: A simulation model of a discharge pumped ArF excimer laser was developed based on the Boltzmann transport equation, rate equations and the circuit equation. Uniform plasma was assumed. It is one-dimensional model. Time histories of the laser output power, number densities of species in the plasma, currents and voltages were calculated numerically. The results were compared with the experimental results by spectroscopic methods. The peak-electron density, discharge voltage, and particle number densities agreed well, but their temporal behaviors differed.
URI: http://hdl.handle.net/11133/1072
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