放電励起ArFエキシマレーザーのシミュレーションモデル

Abstract

A simulation model of a discharge pumped ArF excimer laser was developed based on the Boltzmann transport equation, rate equations and the circuit equation. Uniform plasma was assumed. It is one-dimensional model. Time histories of the laser output power, number densities of species in the plasma, currents and voltages were calculated numerically. The results were compared with the experimental results by spectroscopic methods. The peak-electron density, discharge voltage, and particle number densities agreed well, but their temporal behaviors differed.