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Please use this identifier to cite or link to this item: http://hdl.handle.net/11133/1058

Title: 半導体レーザの光音響効果を利用した欠陥検出に関する研究
Other Titles: ハンドウタイ レーザ ノ ヒカリ オンキョウ コウカ オ リヨウシタ ケッカン ケンシュツ ニカンスル ケンキュウ
Study on Defect Detection Using Photoacoustic Effect of Semiconductor Laser
Authors: 山田, 悦生
津田, 紀生
山田, 諄
TSUDA, Norio
Issue Date: 31-Mar-1998
Publisher: 愛知工業大学
Abstract: A Photoacoustic Effect is a phenomenon in which the acoustic waves are generated by the irradiation of the laser light modulated by the supersonic wave frequency. A Defect detection using the photoacoustic effect has been studied. A semiconductor laser which has a power of 10mW and is modulated by 40kHz is used as a light source. Though the photoacoustic signal is very low in this case, a small defect which has a diameter of about 1.5mm can be detected by finding the proper condition of an acoustic sensor which detects the photoacoustic signal. It has a high resolution in defect detection and some adjacent defects can be detected because the laser light can be focused to the extremely small spot.
URI: http://hdl.handle.net/11133/1058
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