自己結合型距離計の安定化に関する研究

Abstract

A compact and simple distance meter based on self-coupled effect of semiconductor laser has been developed. Using the interference in the laser resonator with the returned light from external surface, the sensor of the distance meter is composed of only a laser diode and a lens. It could be much smaller than other distance sensors. It is obtained that the accuracy of this distance meter is below 1%. This distance meter has good accuracy when the measurements condition such as surround temperature, modulation frequency and amplitude is a constant. If these conditions are changed, the error increases. Maikeruson interferometer is used to decrease the error. The change of the laser wavelength is measured by the interferometer which take a part of output laser light. To compensate the distance meter by the interferometer, the errors from change of the measurements condition much decrease.