鉄-カオリン傾斜機能材料のエキシマレーザ加工に関する研究

Abstract

Excimer laser is a powerful laser for the micro-processing. Functionally Graded Materials (FGMs) are expected to be useful materials in industry, which possess a dual characters of two materials. We have to see the best condition in the laser processing for industrial application. Therefore, it is necessary to study the characteristics of ablation plasma and to analyzed the processing mechanism. This paper describes the experimental results of the laser processing and the analysis of the characteristics. Experimental conditions are as follows : laser medium XeCl, wavelength 308nm, pulse energy 500mJ pulse width 30ns. Iron-Kaolin FGMs are produced with ferric oxide powder (Fe)_2O_3 and kaolin powder (Al)_2O_3-SiO_2 by the progressive lamination method. It was concluded that kaolin was processed by the ablation process and iron was processed by the thermal process.